dI(y)(dng)B(ti)
mco늳mc(din)^
mco늳mc(din)^
1. o늳m
a. (yu)c(din)
mЧʸ_(d)99%ϣpʧСw100-200Pa,g(sh)죬(yng)ÏV
b. ȱc(din)
O(sh)ռeҪ߉ֱԴϵy(tng)һͶYM(fi)øúN׃^mЧwӰ푴b\(yn)йˮƽҪ
2. ܇m
a. (yu)c(din)
mЧʺܸ_(d)99.98%m(yng)(qing)̎ͬ͵weo늳mײĸ߱mЧm(yng)|(zh)ȷٵ׃Ҳһķ(wn)ԣY(ji)(gu)(ni)o(f)sY(ji)(gu)
b. ȱc(din)
pʧw800-1500Pa
xm
1. ʹÜض
ڴʽmfʹÜضȡQڃɂ(g)һǞVϵ߳ܜضȣڶǚwضȱ¶c(din)ضĿǰڲwVϵĴʹÜضȿ_(d)280棬@һضȵĚw횲ȡشʩ¶c(din)Ĝضȣ횲ȡشʩ
ʽmfʹÜضcmЧP(gun)ϵ@@һc(din)ͬ늳m늳mfضȵ׃Ӱ푵ۉmıȣӰ푳mЧ
2.m̎L(fng)Q
̎L(fng)ָmچλr(sh)g(ni)܃wweλÿСr(sh)ÿСr(sh)(bio)ǴʽmO(sh)Ӌ(j)Ҫ֮һ